SINO-TECHNO FOCUS Long-Term Relationship Best Quality Cost Saving Delivery Total Solutions TOOL COVERAGE ETCH / CVD / IMPLANTER / PVD / PHOTO Lam ( 4400,4500,9400,9600,..) TEL (8500,DRM,SCCM) Nikon / ASML / Eaton / VARIAN / Novellus COMPANY PRODUCTS Spare Parts 1. Ceramic / Q' tz / SIC / Bellows / Graphite 2. AL, SIC, Pore-free, CFRP, O-ring 3. Engineering Plastics 4. Up-Graded Stepper,Scanner Chuck 5. Heater Pedestal 6. AMAT PLUS (CPR) Heater Block 7. AMAT DXZ Heater 8. LAM 4500 Confinement Ring 9. AMAT WXZ Heater Refurbish and Repair 1. Refurbish / Up-Grade Products. 2. MCA E-Chuck / MCA Plus / Polyimide ESC / Ceramic ESC 3. RF Generator and DC Power Supply Repair 4. PRI / MECS / BROOKS / GENMARK / YASGAWA Robot Overhaul 5. EBARA / ALCATEL / KASHYMA Pump Overhaul 6. ENDURA 5500 Heater Repair or Refurbish 7. Chamber Parts ( Y2O3 & Al2O3 ) 8. VARIAN Roplat & Tilter Head Overhaul 9. ETCH Bottom Match and Mini Match Overhaul 10. Novellus Heater Block Repair 11. ESC Refurbish